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Piezoresistive integrated pressure sensor circuit

2014-11-28 08:22  
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Piezoresistive integrated pressure sensor circuit
To deal with temperature drift of sensor's sensitivity, the general method of compensation is to change the supply voltage. With the development of semiconductor technology, there has emerged integrated piezoresistive pressure sensor, which is monolithic integrated pressure sensor composed of electric bridge formed by four sense resistors, the voltage amplifier, and the temperature compensation circuitry. The Graph is its circuit diagram and scheme. Owning to the temperature compensation circuit and differential amplifier that integrated pressure sensor applied, its sensitivity temperature coefficient is almost amount to zero.